Usoro nkwadebe mkpụrụ kristal na SiC otu kristal uto 3

Nyochaa uto
Nkesilicon carbide (SiC)A na-akwado kristal mkpụrụ site na usoro akọwapụtara wee kwado ya site na uto kristal SiC. Ikpokoro uto ejiri mee ihe bụ ọkụ induction SiC nke mebere onwe ya nwere okpomoku uto nke 2200℃, nrụgide uto nke 200 Pa, yana ogologo oge uto nke 100 awa.

Nkwadebe gụnyere a6-inch SiC waferna ma ihu carbon na silicon a na-egbu maramara, awafernha nha nke ≤10 µm, na ihu ihu silicon nke ≤0.3 nm. A kwadokwara dayameta 200 mm, akwụkwọ graphite gbara ọkpụrụkpụ 500 µm, yana gluu, mmanya na akwa na-enweghị akwa.

NkeSiC waferA na-ekpuchi ya na nrapado n'elu njikọ maka 15 sekọnd na 1500 r / min.

The nrapado na bonding elu nkeSiC wafera kpọrọ nkụ na efere ọkụ.

Akwụkwọ graphite naSiC wafer(Bonding elu chere ihu ala) ka a na-ekpokọta si na ala ruo n'elu ma tinye ya n'ime ọkụ ọkụ na-ekpo ọkụ nke mkpụrụ kristal. A na-eme ịpị ọkụ na-ekpo ọkụ dị ka usoro nchịkọta ọkụ na-edozi. Ọgụgụ 6 na-egosi elu mkpụrụ kristal mgbe usoro ntolite gasịrị. Enwere ike ịhụ na elu kristal mkpụrụ ahụ dị nro na-enweghị ihe ịrịba ama nke delamination, na-egosi na kristal mkpụrụ SiC nke a kwadebere n'ọmụmụ ihe a nwere àgwà dị mma na nnukwu njikọ njikọ.

Mmechi
N'ịtụle usoro njikọ na nghọta dị ugbu a maka nhazi kristal mkpụrụ, a tụrụ aro ijikọ njikọ na usoro nkwudo. Ọmụmụ ihe a lekwasịrị anya na nkwadebe ihe nkiri carbon nawaferUsoro njikọ akwụkwọ graphite chọrọ maka usoro a, na-eduga na nkwubi okwu ndị a:

Viscosity nke nrapado chọrọ maka ihe nkiri carbon na wafer kwesịrị ịbụ 100 mPa·s, yana okpomọkụ carbonization nke ≥600 ℃. Ebe kacha mma carbonization bụ ikuku echedoro argon. Ọ bụrụ na emere ya n'okpuru ọnọdụ agụụ, ogo agụụ kwesịrị ịbụ ≤1 Pa.

Ma usoro carbonization na njikọ njikọ chọrọ ọgwụgwọ okpomọkụ dị ala nke carbonization na nchikota adhesives n'elu wafer iji chụpụ gas site na nrapado, na-egbochi peeling na ntụpọ efu na oyi akwa njikọ n'oge carbonization.

Ngwakọta njikọ maka akwụkwọ wafer / graphite kwesịrị inwe viscosity nke 25 mPa·s, yana nrụgide njikọ nke ≥15 kN. N'oge usoro njikọ, okpomọkụ kwesịrị ịdị nwayọọ nwayọọ na oke okpomọkụ (<120 ℃) ​​n'ihe dị ka awa 1.5. Ntụle uto kristal SiC gosipụtara na kristal mkpụrụ SiC a kwadebere na-emezu ihe achọrọ maka uto SiC kristal dị elu, na-enwe ebe mkpụrụ kristal dị larịị na enweghị oke.