SiC mkpuchi graphite isi

Dị ka otu n'ime isi components nkeNgwa MOCVD, graphite isi bụ ụgbọelu na kpo oku ozu nke mkpụrụ, nke kpọmkwem na-ekpebi uniformity na ịdị ọcha nke film ihe, otú àgwà ya kpọmkwem na-emetụta nkwadebe nke epitaxial mpempe akwụkwọ, na n'otu oge ahụ, na-abawanye nke ọnụ ọgụgụ. na-eji na mgbanwe nke ọnọdụ ọrụ, ọ dị nnọọ mfe iyi, nke ndị consumables.

Ọ bụ ezie na graphite nwere ọmarịcha thermal conductivity na nkwụsi ike, ọ nwere ezigbo uru dị ka isi akụrụngwa nkeNgwa MOCVD, ma na usoro mmepụta, graphite ga-emebi ntụ ntụ n'ihi ihe fọdụrụ nke gas na-emebi emebi na ihe ndị dị na ígwè, na ndụ ọrụ nke graphite base ga-ebelata nke ukwuu.N'otu oge ahụ, ntụ ntụ graphite na-ada ada ga-eme ka mmetọ na mgbawa.

Mpụta nke teknụzụ mkpuchi nwere ike inye ndozi ntụ ntụ n'elu, kwalite conductivity thermal, na nhata nkesa okpomọkụ, nke ghọrọ teknụzụ bụ isi iji dozie nsogbu a.Graphite base inNgwa MOCVDojiji gburugburu, graphite isi mkpuchi mkpuchi kwesịrị izute ndị a àgwà:

(1) Enwere ike kechie ntọala graphite n'ụzọ zuru ezu, na njupụta dị mma, ma ọ bụghị ya, graphite base dị mfe imebi na gas na-emebi emebi.

(2) Nchikota ike na graphite isi dị elu iji hụ na mkpuchi adịghị mfe ịdapụ mgbe ọtụtụ okpomọkụ dị elu na obere okpomọkụ cycles.

(3) Ọ nwere ezigbo nkwụsi ike nke kemịkal iji zere ọdịda mkpuchi na oke okpomọkụ na ikuku na-emebi emebi.

SiC nwere uru nke nguzogide corrosion, elu okpomọkụ conductivity, thermal ujo nkwụsi ike na elu kemịkal kwụsie ike, na ike na-arụ ọrụ nke ọma na GaN epitaxial ikuku.Na mgbakwunye, ọnụọgụ mgbasawanye thermal nke SiC dị iche na nke graphite, yabụ SiC bụ ihe kachasị amasị maka mkpuchi elu nke isi graphite.

Ka ọ dị ugbu a, SiC nkịtị bụ ụdị 3C, 4H na 6H, yana ojiji SiC nke ụdị kristal dị iche iche dị iche.Dịka ọmụmaatụ, 4H-SiC nwere ike ịmepụta ngwaọrụ dị elu;6H-SiC bụ ihe kwụsiri ike ma nwee ike imepụta ngwaọrụ fotoelectric;N'ihi nhazi ya na GaN, enwere ike iji 3C-SiC mepụta akwa epitaxial GaN ma mepụta ngwaọrụ SiC-GaN RF.A na-akpọkwa 3C-SiC dị kaβ-SiC, na ihe dị mkpa ejiβ-SiC dị ka ihe nkiri na ihe mkpuchi, ya mereβ-SiC ugbu a bụ isi ihe maka mkpuchi.