N'ime yinye ụlọ ọrụ semiconductor, ọkachasị na igwe semiconductor ọgbọ nke atọ (wide bandgap semiconductor) ụlọ ọrụ, enwere mkpụrụ naepitaxialn'ígwé. Kedu ihe ọ pụtaraepitaxialoyi akwa? Kedu ihe dị iche n'etiti substrate na substrate?
Mkpụrụ ahụ bụ awafermere nke semiconductor otu ihe kristal. Mkpụrụ ahụ nwere ike ịbanye ozugbowafernjikọ nrụpụta iji mepụta ngwaọrụ semiconductor, ma ọ bụ enwere ike ịhazi yaepitaxialusoro iji mepụta wafers epitaxial. The mkpụrụ bụ ala nkewafer(bee wafer, ị nwere ike nweta otu ịnwụ ọzọ, wee chịkọta ya ka ọ bụrụ mgbawa akụkọ ifo) (n'ezie, a na-ejikarị ala nke mgbawa kpuchie ya na akwa ọla edo azụ, nke a na-eji dị ka njikọ "ala", ma a na-eme ya na usoro azụ), na isi nke na-arụ ọrụ nkwado dum (a na-ewu ụlọ elu na mgbawa na mkpụrụ).
Epitaxy na-ezo aka na usoro nke na-eto eto otu kristal ọhụrụ na otu mkpụrụ kristal nke ejiri nlezianya mee ya site na ịkpụ, ichikota, polishing, wdg. Otu kristal ọhụrụ nwere ike ịbụ otu ihe ahụ dị ka mkpụrụ, ma ọ bụ ọ nwere ike ịbụ ihe dị iche iche. (homoepitaxial ma ọ bụ heteroepitaxial).
Ebe ọ bụ na ọhụrụ kpụrụ otu crystal oyi akwa na-eto tinyere mkpụrụ kristal agba, ọ na-akpọ epitaxial oyi akwa (na-emekarị ọtụtụ microns oké. Were silicon dị ka ihe atụ: pụtara silicon epitaxial ibu bụ na-eto eto a oyi akwa nke crystal na ezi lattice Ọdịdị iguzosi ike n'ezi ihe. N'elu mkpụrụ osisi silicon otu kristal nwere ụfọdụ ntụgharị kristal na mgbochi dị iche iche na ọkpụrụkpụ dị ka mkpụrụ), na mkpụrụ nke nwere oyi akwa epitaxial ka a na-akpọ epitaxial wafer (epitaxial wafer = epitaxial Layer + substrate). A na-emepụta ngwaọrụ na oyi akwa epitaxial.
E kewara epitaxiality n'ime homoepitaxiality na heteroepitaxial. Homoepitaxiality bụ itolite oyi akwa epitaxial nke otu ihe dị ka mkpụrụ nke dị na mkpụrụ. Kedu ihe pụtara homoepitaxiality? - Melite nkwụsi ike ngwaahịa na ntụkwasị obi. Ọ bụ ezie na homoepitaxiality bụ ịmalite oyi akwa epitaxial nke otu ihe ahụ dị ka mkpụrụ, ọ bụ ezie na ihe ahụ bụ otu ihe ahụ, ọ nwere ike imeziwanye ịdị ọcha ihe na ịdị n'otu nke elu wafer. E jiri ya tụnyere wafers ndị a na-egbu maramara nke a na-esi na ihicha igwe arụ ọrụ, mkpụrụ nke ejiri epitaxiality na-edozi nwere elu elu elu, ịdị ọcha dị elu, mpe mpe mpe mpe mpe akwa, yana adịghị ọcha dị n'elu. Ya mere, resistivity bụ otu, na ọ na-adị mfe ịchịkwa n'elu ntụpọ dị ka n'elu ahụ, stacking mmejọ, na dislocations. Epitaxy abụghị naanị na-eme ka arụmọrụ ngwaahịa dịkwuo mma, kamakwa na-eme ka nkwụsi ike na ntụkwasị obi ngwaahịa.
Kedu uru ọ dị n'ime ka oyi akwa silicon atom epitaxial ọzọ na mkpụrụ silicon wafer? N'ime usoro silicon CMOS, uto epitaxial (EPI, epitaxial) na mkpụrụ wafer bụ usoro usoro dị oke egwu.
1. Mma mma kristal
Nrụrụ mkpụrụ mbụ na adịghị ọcha: Mkpụrụ wafer nwere ike ịnwe ụfọdụ ntụpọ na adịghị ọcha n'oge usoro nrụpụta. Uto nke oyi akwa epitaxial nwere ike iwepụta ihe dị elu, nke na-adịghị mma na adịghị ọcha na-etinye uche na otu-crystalline silicon oyi akwa na mkpụrụ, nke dị ezigbo mkpa maka ịmepụta ngwaọrụ na-esote. Ọdịdị kristal n'ụdị: uto Epitaxial nwere ike hụ na usoro kristal dị otu, belata mmetụta nke oke ọka na ntụpọ dị na mkpụrụ osisi, wee si otú a melite ogo kristal nke wafer dum.
2. Meziwanye arụmọrụ eletrik
Welie njirimara ngwaọrụ: Site na itolite oyi akwa epitaxial na mkpụrụ, enwere ike ịchịkwa itinye uche doping na ụdị silicon iji bulie arụmọrụ eletriki nke ngwaọrụ ahụ. Dịka ọmụmaatụ, doping nke oyi akwa epitaxial nwere ike ịhazigharị voltaji ọnụ ụzọ na parampat eletriki ndị ọzọ nke MOSFET. Belata ntapu ugbu a: akwa epitaxial dị elu nwere njupụta ntụpọ dị ala, nke na-enyere aka belata ntapu ugbu a na ngwaọrụ ahụ, si otú a na-emeziwanye arụmọrụ na ntụkwasị obi nke ngwaọrụ ahụ.
3. Nkwado elu usoro ọnụ
Mbelata nha njirimara: N'ime obere usoro ọnụ (dị ka 7nm, 5nm), nha njirimara ngwaọrụ na-aga n'ihu na-ebelata, na-achọ ihe ndị a nụchara anụcha na nke dị elu. Nkà na ụzụ uto Epitaxial nwere ike imezu ihe ndị a chọrọ ma kwado ịrụ ọrụ dị elu na njupụta dị elu n'ichepụta sekit jikọtara ọnụ. Meziwanye voltaji ndakpọ: Enwere ike ịmebe oyi akwa epitaxial ka ọ nwee voltaji nkwụsịtụ dị elu, nke dị oke mkpa maka ịmepụta ngwaọrụ dị elu na elu voltaji. Dịka ọmụmaatụ, na ngwaọrụ ike, oyi akwa epitaxial nwere ike ịbawanye voltaji mgbawa nke ngwaọrụ ahụ ma mee ka oke ọrụ dị mma.
4. Usoro ndakọrịta na multi-layer Ọdịdị
Ọdịdị Multi-layer: Teknụzụ uto Epitaxial na-enye ohere ka e nwee ihe owuwu dị iche iche na-etolite na mkpụrụ, na ọkwa dị iche iche nwere ike ịnwe mkpokọta doping na ụdị dị iche iche. Nke a na-enye aka nke ukwuu maka imepụta ngwaọrụ CMOS dị mgbagwoju anya yana nweta njikọta akụkụ atọ. Ndakọrịta: Usoro uto epitaxial dabara nke ukwuu na usoro nrụpụta CMOS dị ugbu a yana enwere ike itinye ya ngwa ngwa n'ime usoro nrụpụta dị ugbu a na-agbanweghị ahịrị usoro ahụ nke ukwuu.
Oge nzipu: Jul-16-2024