Silicon Carbide mkpuchi Epitaxial Reactor Barrel

Nkọwa dị mkpirikpi:

Semicera bụ ụlọ ọrụ teknụzụ dị elu na-etinye aka na nyocha ihe ruo ọtụtụ afọ, yana ndị otu R&D na-eduga yana R&D jikọtara ọnụ na nrụpụta. Nye Silicon Carbide mkpuchi Epitaxial Reactor Barrel ahaziri ka anyị na ndị ọkachamara n'ịrụ ọrụ kwurịta ka ị ga-esi nweta ọrụ kachasị mma na uru ahịa maka ngwaahịa gị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Kedu ihe kpatara mkpuchi Silicon Carbide?

Na mpaghara semiconductor, nkwụsi ike nke akụkụ ọ bụla dị ezigbo mkpa maka usoro dum. Otú ọ dị, na gburugburu ebe okpomọkụ dị elu, graphite na-adị mfe oxidized na efu, na mkpuchi SiC nwere ike inye nchebe siri ike maka akụkụ graphite. N'imeSemiceraotu, anyị nwere anyị onwe anyị graphite ọcha nhazi akụrụngwa, nke nwere ike ịchịkwa ịdị ọcha nke graphite n'okpuru 5ppm. Ịdị ọcha nke mkpuchi silicon carbide dị n'okpuru 0.5 ppm.

Uru anyị, gịnị kpatara ịhọrọ Semicera?

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✓ Ọrụ omenala

Ngwa

Susceptor Uto Epitaxy

Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.

Silicon Epitaxy Susceptor

Silicon Carbide Epitaxy Susceptor

LED Chip Mmepụta

N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.

Epitaxy Susceptor LED

Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.

Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.

Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%.