SiC epitaxy

Nkọwa dị mkpirikpi:

Semicera na-enye ihe nkiri dị mkpa (silicon carbide) SiC epitaxy na mkpụrụ maka mmepe nke ngwaọrụ silicon carbide. Weitai na-agba mbọ ịnye ngwaahịa dị mma na ọnụ ahịa asọmpi, anyị na-atụkwa anya ịbụ onye mmekọ gị ogologo oge na China.

 

Nkọwa ngwaahịa

Mkpado ngwaahịa

SiC epitaxy (2)(1)

Nkọwa ngwaahịa

4h-n 4inch 6inch dia100mm sic mkpụrụ wafer 1mm ọkpụrụkpụ maka ingot uto

Ụdị ahaziri ahazi / 2inch / 3inch / 4inch / 6inch 6H-N / 4H-SEMI / 4H-N SIC ingots / ịdị ọcha dị elu 4H-N 4inch 6inch dia 150mm silicon carbide single crystal (sic) substrates wafersS / ahaziri dị ka-cut sic wafersMmepụta 4inch ọkwa 4H-N 1.5mm SIC Wafers maka mkpụrụ kristal

Banyere Silicon Carbide (SiC) Crystal

Silicon carbide (SiC), makwaara dị ka carborundum, bụ semiconductor nwere silicon na carbon nwere usoro kemịkalụ SiC. A na-eji SiC na ngwaọrụ eletrọnịkị semiconductor nke na-arụ ọrụ na oke okpomọkụ ma ọ bụ nnukwu voltaji, ma ọ bụ abụọ.SiC bụkwa otu n'ime ihe ndị dị mkpa LED, ọ bụ mkpụrụ na-ewu ewu maka ngwaọrụ GaN na-eto eto, ọ na-ejekwa ozi dị ka onye na-ekesa ọkụ na elu- ike LEDs.

Nkọwa

Ngwongwo

4H-SiC, otu kristal

6H-SiC, otu kristal

Parameters Lattice

a=3.076 Å c=10.053 Å

a=3.073 Å c=15.117 Å

Usoro nchịkọta

ABCB

ABCACB

Mohs ike

≈9.2

≈9.2

Njupụta

3.21g/cm3

3.21g/cm3

Therm. Ọnụ ego mgbasawanye

4-5×10-6/K

4-5×10-6/K

Ntụgharị ntụgharị @750nm

enweghị = 2.61
Ọnụ = 2.66

enweghị = 2.60
Ọnụ = 2.65

Dielectric Constant

c~9,66

c~9,66

Nrụpụta ọkụ (ụdị N, 0.02 ohm.cm)

a~4.2 W/cm·K@298K
c~3.7 W/cm·K@298K

 

Nrụpụta ọkụ (ọkara mkpuchi)

a ~ 4.9 W/cm·K@298K
c~3.9 W/cm·K@298K

a ~ 4.6 W/cm·K@298K
c~3.2 W/cm·K@298K

Band-oghere

3.23 eV

3.02 eV

Ubi eletrik na-agbaji

3-5 × 106V / cm

3-5 × 106V / cm

Saturation Drift Velocity

2.0 × 105m / s

2.0 × 105m / s

SiC wafers

Ụlọ ọrụ Semicera Ụlọ ọrụ Semicera 2 Igwe eji eme ihe Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD Ọrụ anyị


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