Nkeji akụkụ maka ngwa SiC Epitaxial

Nkọwa dị mkpirikpi:

Akụkụ graphite mkpuchi SiC maka akụrụngwa epitaxial SiC.

Ntinye na ojiji ngwaahịa: tube quartz ejikọtara, nwere ike ịfefe gas ka ọ na-ebugharị tray base ntụgharị, njikwa okpomọkụ

Ọnọdụ ngwaọrụ nke ngwaahịa: n'ime ụlọ mmeghachi omume, ọ bụghị na kọntaktị kpọmkwem na wafer

Ngwaahịa ndị dị n'okpuru ala: ngwaọrụ ike

Isi ọnụ ahịa: ụgbọ ala ume ọhụrụ


Nkọwa ngwaahịa

Mkpado ngwaahịa

Ekpuchiri SiCAkụkụ nke Halfmoon eseresebụ isi akụrụngwa eji na usoro nrụpụta semiconductor, ọkachasị maka akụrụngwa epitaxial SiC. Anyị na-eji nkà na ụzụ anyị nwere ikike ime ka ọkara ọnwa na ịdị ọcha dị oke elu, mkpuchi mkpuchi dị mma na ndụ ọrụ magburu onwe ya, yana nnukwu nguzogide kemịkalụ na ihe nkwụsi ike ọkụ.

 
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Igwe eji eme ihe
Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD
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