Nkọwa
Silicon Carbide EpitaxialA na-emezi diski Wafer maka ngwa VEECO sitere na semicera maka usoro epitaxial dị elu, na-ahụ na nsonaazụ dị elu na ha abụọ.Dị ka EpitaxynaSiC epitaxyngwa. Emebere diski wafer ndị a maka akụrụngwa VEECO, na-eme ka arụmọrụ na arụmọrụ nke usoro nrụpụta semiconductor dị iche iche. Ọkachamara Semicera na-ekwe nkwa ịdịte aka pụrụiche na nkenke maka ngwa dị oke mkpa.
Ihe diski epitaxial wafer ndị a dị mma maka iji yaMOCVD Susceptorusoro, na-enye nkwado siri ike maka ihe ndị dị mkpa dị kaPSS Etching Carrier, ICP Etching Carrier, naOnye na-ebu RTP. Na mgbakwunye, ha na-enye nkwado ndakọrịta naLED Epitaxial Susceptor, Barrel Susceptor, na Monocrystalline Silicon usoro, n'ịhụ na gị mmepụta ahịrị na-ejigide ụkpụrụ kasị elu nke arụmọrụ na izi ezi.
Ezubere maka teknụzụ na-egbutu ọnụ, diski wafer ndị a na-enye aka nke ukwuu na mmepụta nke akụkụ fotovoltaic ma mee ka usoro mgbagwoju anya dị ka GaN na SiC Epitaxy. Ma ejiri ya maka nhazi Pancake Susceptor ma ọ bụ ngwa ndị ọzọ na-achọsi ike, semicera's Silicon Carbide Epitaxial Wafer Discs na-enye ntọala a pụrụ ịdabere na ya maka nrụpụta semiconductor dị elu, na-ahụ na arụmọrụ kacha mma na ogologo oge.
Isi atụmatụ
1 .High ịdị ọcha SiC mkpuchi graphite
2. Nguzogide okpomọkụ kachasị elu & thermal uniformity
3. Ọ dị mmaSiC crystal kpuchiemaka elu dị larịị
4. Nnukwu ogologo oge megide ihicha kemịkalụ
Nkọwa bụ isi nke mkpuchi CVD-SIC:
SiC-CVD | ||
Njupụta | (g/cc) | 3.21 |
Ike mgbanwe | (Mpa) | 470 |
Mgbasa ọkụ ọkụ | (10-6/K) | 4 |
Thermal conductivity | (W/mK) | 300 |
Mbukota na mbupu
Ikike inye:
10000 Iberibe/Iberibe kwa ọnwa
Nkwakọ ngwaahịa na nnyefe:
Mbukota: Standard & siri ike mbukota
Akpa Poly + Igbe + Katọn + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Etiti oge:
Ọnụọgụ(Iberibe) | 1-1000 | >1000 |
Est. Oge (ụbọchị) | 30 | A ga-enwe mkparịta ụka |





