Nkọwa
Ụlọ ọrụ anyị na-enyemkpuchi SiCusoro ọrụ site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe echekwara n'elu.kpuchieihe, na-akpụ oyi akwa mkpuchi SIC.
Njirimara nke isi mmiri ịsa ahụ SiC bụ ndị a:
1. Nkwụsị nke corrosion: Ihe SiC nwere ezigbo nguzogide corrosion ma nwee ike iguzogide mmebi nke mmiri mmiri mmiri dị iche iche na ngwọta dị iche iche, ọ dịkwa mma maka nhazi nhazi dị iche iche na usoro ọgwụgwọ elu.
2. Nkwụsi ike okpomọkụ dị elu:SiC nozzlesnwere ike idowe nkwụsi ike nhazi na gburugburu ebe okpomọkụ dị elu ma dị mma maka ngwa ndị chọrọ ọgwụgwọ okpomọkụ dị elu.
3. Ịfesa ekike:SiC nozzleimewe nwere ezi spraying akara arụmọrụ, nke nwere ike nweta edo mmiri mmiri nkesa na hụ na ọgwụgwọ mmiri mmiri evenly kpuchie na lekwasịrị n'elu.
4. Akwa mkpuchi mkpuchi: Ihe SiC nwere ike siri ike ma na-eyi nguzogide ma nwee ike iguzogide iji ogologo oge na esemokwu.
A na-eji isi mmiri mmiri SiC eme ihe na usoro ọgwụgwọ mmiri na mmepụta semiconductor, nhazi kemịkalụ, mkpuchi elu, electroplating na mpaghara ụlọ ọrụ ndị ọzọ. Ọ nwere ike na-enye ike, edo na a pụrụ ịdabere na spraying mmetụta iji hụ na àgwà na agbanwe agbanwe nke nhazi na ọgwụgwọ.
Isi atụmatụ
1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.
Nkọwa isi nke mkpuchi CVD-SIC
| Njirimara SiC-CVD | ||
| Ọdịdị kristal | FCC β oge | |
| Njupụta | g/cm ³ | 3.21 |
| Isi ike | Vickers isi ike | 2500 |
| Nha ọka | μm | 2 ~ 10 |
| Ịdị ọcha kemịkalụ | % | 99,99995 |
| Ike ikpo ọkụ | J·kg-1 · K-1 | 640 |
| Sublimation okpomọkụ | ℃ | 2700 |
| Ike Felexural | MPa (RT 4-isi) | 415 |
| Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
| Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
