Silicon Carbide (SiC) Wafer Susceptors maka MOCVD

Nkọwa dị mkpirikpi:

Silicon Carbide (SiC) wafer susceptor bụ otu n'ime isi ihe eji eme ihe na Metal Organic Chemical Vapor Deposition (MOCVD). Isi ọrụ ya bụ ileba anya na ijikwa ihe ndị dị mkpa na usoro MOCVD iji hụ na uto uto na ịdị n'otu nke ihe nkiri dị mkpa.

 


Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwa

NkeSilicon Carbide (SiC) Wafer Susceptorsmaka MOCVD sitere na semicera emebere maka usoro epitaxial dị elu, na-enye arụmọrụ dị elu maka ha abụọDị ka EpitaxynaSiC epitaxyngwa. Uzo ohuru ohuru nke Semicera na-eme ka ihe nleba anya ndi a na-adigide ma di oma, na-enye nkwụsi ike na nkenke maka ọrụ nrụpụta dị oke mkpa.

Injinia iji kwado mkpa mgbagwoju anya nkeMOCVD SusceptorSistemu, ngwaahịa ndị a na-agbanwe agbanwe, dakọtara na ndị na-ebu dị ka PSS Etching Carrier, ICP Etching Carrier, na RTP Carrier. Mgbanwe ha na-eme ka ha dị mma maka ụlọ ọrụ teknụzụ dị elu, gụnyere ndị na-arụ ọrụEpitaxial LEDSusceptor na Monocrystalline Silicon.

Na otutu nhazi, gụnyere Barrel Susceptor na Pancake Susceptor, ndị na-ahụ maka wafer ndị a dịkwa mkpa na mpaghara fotovoltaic, na-akwado mmepụta nke Photovoltaic Parts. Maka ndị na-emepụta semiconductor, ikike ijikwa GaN na usoro SiC Epitaxy na-eme ka ndị na-ahụ maka ihe ndị a bara uru nke ukwuu maka ịhụ na mmepụta dị elu gafee ọtụtụ ngwa.

 

Isi atụmatụ

1 .High ịdị ọcha SiC mkpuchi graphite

2. Nguzogide okpomọkụ kachasị elu & thermal uniformity

3. Ọ dị mmaSiC crystal kpuchiemaka elu dị larịị

4. Nnukwu ogologo oge megide ihicha kemịkalụ

 

Nkọwa bụ isi nke mkpuchi CVD-SIC:

SiC-CVD
Njupụta (g/cc) 3.21
Ike mgbanwe (Mpa) 470
Mgbasa ọkụ ọkụ (10-6/K) 4
Thermal conductivity (W/mK) 300

Mbukota na mbupu

Ikike inye:
10000 Iberibe/Iberibe kwa ọnwa
Nkwakọ ngwaahịa na nnyefe:
Mbukota: Standard & siri ike mbukota
Akpa Poly + Igbe + Katọn + Pallet
Port:
Ningbo/Shenzhen/Shanghai
Etiti oge:

Ọnụọgụ(Iberibe)

1-1000

>1000

Est. Oge (ụbọchị) 30 A ga-enwe mkparịta ụka
Ụlọ ọrụ Semicera
Ụlọ ọrụ Semicera 2
Igwe eji eme ihe
Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD
Ụlọ Semicera Ware
Ọrụ anyị

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