Silicon carbide vacuum Chuckbụ isi akụrụngwa eji na semiconductor n'ichepụta na nkenke ụlọ ọrụ ngwa maka ijide, njikwa na idobe mkpa na adịghị ike workpieces dị ka.wafer, iko substrates na ngwa anya components. Ọ na-eji ike agụụ na-emepụta nrụgide na-adịghị mma, na-enye ya ohere ijidesi ike na elu nke workpiece ma hapụ ya mgbe ọ dị mkpa.Silicon carbide vacuum Chucksna-ọtụtụ ebe na-eji semiconductor n'ichepụta, flat panel ngosi, ngwa anya n'ichepụta na ndị ọzọ nkenke ulo oru ubi. Enwere ike iji ha rụọ ọrụ dịkawaferloading na nyefe, substrate itinye n'ọnọdụ, iko efere grabbing na njikwa, na-enye elu-nkenke, elu-nkwụsị na mma workpiece njikwa ngwọta.
Njirimara nke silicon carbide vacuum chucks bụ ndị a:
1. Igwe ọkụ dị elu: Silicon carbide nwere nkwụsi ike dị elu dị elu ma nwee ike ịrụ ọrụ ruo ogologo oge na ọnọdụ okpomọkụ dị elu na-enweghị mmebi, nke kwesịrị ekwesị maka usoro ndị chọrọ nhazi okpomọkụ.
2. Isi ike dị elu ma na-eyi nguzogide: Silicon carbide nwere ike siri ike ma nwee ike iguzogide esemokwu na iyi, na-abawanye ogologo ndụ na ndụ nke chuck.
3. Kemịkalụ kemịkalụ mara mma: Silicon carbide nwere nnukwu iguzogide kemịkalụ dị iche iche na ihe mgbaze ma nwee ike ịrụ ọrụ nke ọma na gburugburu kemịkalụ.
4. High agụụ akara: Silicon carbide agụụ mmịpụta iko nwere ike inye a pụrụ ịdabere na agụụ sealing, n'ịhụ ike adsorption ike na mma aghọta nke workpieces.
Anyị na-enwe ike chepụta na rụpụta dị ka gị kpọmkwem akụkụ na ezi mma na ezi uche nnyefe oge.
Uru
Nguzogide oxidation dị elu
Nguzogide corrosion mara mma
Ezigbo nguzogide abrasion
Ọnụ ọgụgụ dị elu nke conductivity okpomọkụ
Mmanya onwe onye, obere njupụta
Isi ike dị elu
Nhazi ahaziri ahazi.
Ngwa
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