Mgbanaka CVD SiC siri ikeA na-eji ya n'ọtụtụ ebe na ụlọ ọrụ mmepụta ihe na sayensị na okpomọkụ dị elu, na-emebi emebi na gburugburu ebe abrasive. Ọ na-arụ ọrụ dị mkpa n'ọtụtụ mpaghara ngwa, gụnyere:
1. Semiconductor mmepụta:Mgbanaka CVD SiC siri ikeenwere ike iji kpo oku na ikpo ọkụ nke akụrụngwa semiconductor, na-enye njikwa okpomọkụ kwụsiri ike iji hụ na izi ezi na ịdịgidesi ike nke usoro ahụ.
2. Optoelectronics: N'ihi na ọ dị mma thermal conductivity na elu okpomọkụ na-eguzogide,Mgbanaka CVD SiC siri ikeenwere ike iji ya dị ka ihe nkwado na ikpo ọkụ ọkụ maka lasers, fiber optic communication equipment and optical components.
3. Igwe eji eme ihe nkenke: Enwere ike iji mgbanaka CVD siri ike nke SiC maka ngwa na akụrụngwa na oke okpomọkụ na gburugburu ebe na-emebi emebi, dị ka ọkụ ọkụ dị elu, ngwaọrụ oghere na reactors kemịkalụ.
4. Chemical ụlọ ọrụ: siri ike CVD SiC mgbanaka nwere ike iji na containers, ọkpọkọ na reactors na chemical Jeremaya mere na catalytic Filiks n'ihi na ha corrosion eguzogide na chemical kwụsie ike.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%.