Epitaxy Wafer Carrier bụ ihe dị oke mkpa na mmepụta semiconductor, ọkachasị naDị ka EpitaxynaSiC epitaxyusoro. Semicera jiri nlezianya chepụta ma rụpụta yaWaferNdị na-ebu ibu na-eguzogide oke okpomọkụ na gburugburu kemịkalụ, na-eme ka arụmọrụ dị mma na ngwa dị kaMOCVD Susceptorna Barrel Susceptor. Ma ọ bụ ntinye nke silicon monocrystalline ma ọ bụ usoro epitaxy siri ike, Semicera's Epitaxy Wafer Carrier na-enye ezigbo otu na nkwụsi ike.
Ndị SemiceraEpitaxy Wafer Carrierbụ nke ihe ndị dị elu nke nwere ike ịrụ ọrụ dị mma na ọkụ ọkụ, nke nwere ike ibelata nhụsianya na enweghị ike n'oge usoro ahụ. Ke adianade do, imewe nkeWaferOnye na-ebu ibu nwekwara ike ime mgbanwe na akụrụngwa epitaxy nke nha dị iche iche, si otú a na-emeziwanye nrụpụta mmepụta ihe n'ozuzu ya.
Maka ndị ahịa chọrọ usoro epitaxy dị elu na ịdị ọcha dị elu, Semicera's Epitaxy Wafer Carrier bụ nhọrọ kwesịrị ntụkwasị obi. Anyị na-agba mbọ mgbe niile inye ndị ahịa ezigbo ngwaahịa ngwaahịa na nkwado teknụzụ a pụrụ ịdabere na ya iji nyere aka melite ntụkwasị obi na arụmọrụ nke usoro mmepụta.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.98%, ịdị ọcha nke mkpuchi sic karịrị 99.9995%.
Raw Silicon Carbide Paddle na SiC Process Tube na nhicha
Silicon Carbide Wafer Boat CVD SiC kpuchie
