Lekwasị anyaMgbanaka CVD SiCbụ ihe mgbanaka silicon carbide (SiC) nke teknụzụ Focus Chemical Vapor Deposition (Focus CVD) kwadebere.
Lekwasị anyaMgbanaka CVD SiCnwere ọtụtụ njirimara arụmọrụ dị mma. Nke mbụ, ọ nwere ike siri ike, ebe mgbaze dị elu na oke okpomọkụ dị elu, ma nwee ike ịnọgide na-enwe nkwụsi ike na nhazi nhazi n'okpuru ọnọdụ okpomọkụ. Nke abuo, Gbado anyaMgbanaka CVD SiCnwere ezigbo nkwụsi ike nke kemịkalụ na nguzogide corrosion, ma nwee nnukwu nguzogide na mgbasa ozi corrosive dị ka acids na alkalis. Tụkwasị na nke ahụ, ọ na-enwekwa conductivity thermal magburu onwe ya na ike ígwè ọrụ, nke kwesịrị ekwesị maka ngwa ngwa chọrọ na okpomọkụ dị elu, nrụgide dị elu na gburugburu ebe obibi.
Lekwasị anyaMgbanaka CVD SiCa na-eji ya eme ihe n'ọtụtụ ebe. A na-ejikarị ya eme ihe maka ikewapụ okpomọkụ na ihe nchebe nke akụrụngwa okpomọkụ dị elu, dị ka ọkụ ọkụ dị elu, ngwaọrụ na-ekpo ọkụ na ndị na-emepụta kemịkalụ. Na mgbakwunye, Gbado anyaMgbanaka CVD SiCnwekwara ike iji na optoelectronics, semiconductor mmepụta, nkenke igwe na aerospace, na-enye elu-arụmọrụ gburugburu ebe obibi ndidi na ntụkwasị obi.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%.
Raw Silicon Carbide Paddle na SiC Process Tube na nhicha
Silicon Carbide Wafer Boat CVD SiC kpuchie
