Ngwakọta Gallium Nitride | GaN Wafers

Nkọwa dị mkpirikpi:

Gallium nitride (GaN), dị ka silicon carbide (SiC) ihe, bụ nke ọgbọ nke atọ nke semiconductor ihe nwere obosara band gap obosara, na nnukwu band gap obosara, elu thermal conductivity, elu eletrọn saturation migration ọnụego, na elu ndakpọ electric ubi pụtara ìhè. njirimara.Ngwa GaN nwere atụmanya dị ukwuu nke ngwa n'ọtụtụ dị elu, oke ọsọ na ikike dị elu dị ka ọkụ na-echekwa ike LED, ihe ngosi laser, ụgbọ ala ume ọhụrụ, grid smart, nkwukọrịta 5G.


Nkọwa ngwaahịa

Mkpado ngwaahịa

GaN Wafers

Ọgbọ nke atọ semiconductor ihe tumadi gụnyere SiC, GaN, diamond, wdg, n'ihi na ya band ọdịiche obosara (Eg) karịrị ma ọ bụ hà 2.3 electron volts (eV), makwaara dị ka wide band gap semiconductor ihe. E jiri ya tụnyere nke mbụ na nke abụọ ọgbọ semiconductor ihe, ọgbọ nke atọ semiconductor ihe nwere uru nke elu thermal conductivity, elu mmebi eletriki, elu juputara eletrọn Mbugharị ọnụego na elu bonding ike, nke nwere ike izute ọhụrụ chọrọ nke ọgbara ọhụrụ technology electronic maka elu. okpomọkụ, ike dị elu, nrụgide dị elu, ugboro ugboro na nguzogide radieshon na ọnọdụ ndị ọzọ siri ike. Ọ nwere atụmanya ngwa dị mkpa na mpaghara nchekwa mba, ụgbọ elu, ikuku ikuku, nyocha mmanụ, nchekwa anya, wdg, ma nwee ike belata ọnwụ ike karịa 50% n'ọtụtụ ụlọ ọrụ dị mkpa dị ka nkwukọrịta brọdband, ike anyanwụ, nrụpụta ụgbọ ala, semiconductor ọkụ, na smart grid, ma nwee ike ibelata olu akụrụngwa karịa 75%, nke bụ ihe dị mkpa maka mmepe sayensị na teknụzụ mmadụ.

 

Ihe 项目

GaN-FS-CU-C50

GaN-FS-CN-C50

GaN-FS-C-SI-C50

Dayameta
晶圆直径

50.8 ± 1 mm

Ọkpụrụkpụ厚度

350 ± 25 μm

Nhazi
晶向

Ụgbọ elu C (0001) kwụsịrị n'akuku M-axis 0.35 ± 0.15°

Isi Flat
主定位边

(1-100) 0 ± 0.5°, 16 ± 1 mm

Ụlọ elu nke abụọ
次定位边

(11-20) 0 ± 3°, 8 ± 1 mm

Omume omume
导电性

Ụdị N

Ụdị N

Ọkara mkpuchi

Nguzogide (300K)
电阻率

<0.1 Ω·cm

<0.05 Ω·cm

> 106 Ω·cm

TTV
平整度

≤15 μm

ỤTA
弯曲度

≤20 μm

Ga Ihu dị n'elu ala adịghị mma
Ga面粗糙度

<0.2 nm (a na-egbu maramara);

ma ọ bụ <0.3 nm (ọgwụgwọ na elu maka epitaxy)

N Ihu Elu Ihu
N面粗糙度

0.5 ~ 1.5 μm

nhọrọ: 1 ~ 3 nm (ezigbo ala); <0.2 nm (a na-egbu maramara)

Njupụta nke Dislocation
位错密度

Site na 1 x 105 ruo 3 x 106 cm-2 (nke CL gbakọrọ)*

Njupụta nnukwu nnukwu ntụpọ
缺陷密度

<2 cm-2

Mpaghara bara uru
有效面积

> 90% (mwepu ntụpọ ihu na nnukwu)

Enwere ike ịhazi ya dị ka ihe ndị ahịa chọrọ si dị, ụdị dị iche iche nke silicon, sapphire, akwụkwọ mpempe akwụkwọ nke SiC dabeere na GaN.

Ụlọ ọrụ Semicera Ụlọ ọrụ Semicera 2 Igwe eji eme ihe Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD Ọrụ anyị


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