Ndị SemiceraSiC paddlesemebere ya maka mgbasawanye ọkụ dị ntakịrị, na-enye nkwụsi ike na nkenke n'ime usoro ebe izizi akụkụ dị oke mkpa. Nke a na-eme ka ha dị mma maka ngwa ebewaferna-edo onwe ya n'okpuru kpo oku na oyi na-ekpo ọkụ ugboro ugboro, ka ụgbọ mmiri wafer na-edobe iguzosi ike n'ezi ihe ya, na-eme ka arụ ọrụ na-agbanwe agbanwe.
Na-agụnye Semicera'ssilicon carbide diffusion paddlesn'ime ahịrị mmepụta gị ga-eme ka ntụkwasị obi nke usoro gị dịkwuo elu, n'ihi njirimara ọkụ na kemịkal ha dị elu. Paddles ndị a zuru oke maka mgbasa, oxidation, na usoro mgbakasị ahụ, na-ahụ na ejiri nlezianya na nkenke edozi wafers n'ime usoro ọ bụla.
Innovation dị na isi nke Semicera'sSiC paddleimewe. Emebere paddles ndị a ka ọ dabara n'enweghị nsogbu n'ime akụrụngwa semiconductor dị ugbu a, na-enye njikwa njikwa emelitere. Ihe owuwu dị fechaa na imewe ergonomic abụghị naanị ịkwalite njem wafer kamakwa na-ebelata oge arụ ọrụ, na-ebute mmepụta nke ọma.
| Njirimara anụ ahụ nke Silicon Carbide recrystallized | |
| Ngwongwo | Uru a na-ahụkarị |
| Okpomọkụ na-arụ ọrụ (°C) | 1600°C (ya na oxygen), 1700°C (mbelata gburugburu ebe obibi) |
| SiC ọdịnaya | > 99.96% |
| Ọdịnaya Si efu | <0.1% |
| Nnukwu njupụta | 2.60-2.70 g / cm3 |
| Porosity pụtara | <16% |
| Ike mkpakọ | > 600 MPa |
| Ike na-ehulata oyi | 80-90 MPa (20°C) |
| Ike na-ehulata ọkụ | 90-100 MPa (1400°C) |
| Mgbasa ọkụ @1500°C | 4,70 10-6/°C |
| Nrụpụta okpomọkụ @1200°C | 23 W/m•K |
| Modulu nke na-agbanwe agbanwe | 240 GPA |
| Mgbochi ujo okpomọkụ | Dị oke mma |
