Ihe mkpuchi ihe eserese eserese SiC maka MOCVD

Ihe mkpuchi ihe eserese eserese SiCmaka MOCVD sitere na semicera ka emebere ya iji nye arụmọrụ pụrụ iche na usoro uto epitaxial. Ihe mkpuchi silicon carbide dị elu na ntọala graphite na-eme ka nkwụsi ike, ịdịte aka, yana ezigbo ikuku ikuku n'oge arụ ọrụ MOCVD (Metal Organic Chemical Vapor Deposition). Site n'iji teknụzụ susceptor ọhụrụ nke semicera, ị nwere ike nweta nkenke ziri ezi na arụmọrụ n'ime.Dị ka EpitaxynaSiC epitaxyngwa.

Ndị aMOCVD Susceptorsemebere ya iji kwado ọtụtụ akụkụ semiconductor dị mkpa, dị kaPSS Etching Carrier, ICP Etching Carrier, naOnye na-ebu RTP, na-eme ka ha nwee ike ịrụ ọrụ dị iche iche etching na epitaxial. Nkwenye Semicera n'ụkpụrụ dị elu na-eme ka a mara na ndị a na-enwe mmetụta na-egbo mkpa siri ike nke mmepụta semiconductor ọgbara ọhụrụ.

Kwesịrị ekwesị maka iji naEpitaxial LEDSusceptor, Barrel Susceptor, na Monocrystalline Silicon Filiks, ndị a nwere ike ịhazi maka nha wafer dị iche iche, gụnyere nhazi Pancake Susceptor. Ha na-arụkwa ọrụ nke ọma na ijikwa akụkụ fotovoltaic, na-eme ka ha bụrụ akụkụ dị mkpa na mmepe nke mkpụrụ ndụ anyanwụ nke ọma.

Na mgbakwunye, SiC Coated Graphite Base Susceptors maka MOCVD bụ nke kachasị maka GaN na SiC Epitaxy, na-enye ndakọrịta dị elu na ihe semiconductor dị elu. Ma ị lekwasịrị anya n'ịkwalite mkpụrụ ma ọ bụ ịkwalite ogo nke uto epitaxial, ndị na-ahụ maka semicera na-enye ntụkwasị obi na arụmọrụ achọrọ maka ịga nke ọma na ụlọ ọrụ teknụzụ dị elu.