A na-arụpụta mgbanaka siri ike Silicon Carbide (SiC) nke Semicera na-enye bụ site na usoro Chemical Vapor Deposition (CVD) wee bụrụ nsonaazụ pụtara ìhè na ngalaba nke ngwa etching ziri ezi. Ndị a siri ike Silicon Carbide (SiC) Etching Rings bụ ndị amaara maka ike siri ike ha dị oke mma, nkwụsi ike ọkụ na nguzogide corrosion, yana njiri mara CVD kacha mma na-ahụ maka ihe kacha mma.
Ezubere nke ọma maka usoro etching, Solid Silicon Carbide(SiC) Etching Rings' Ọdịdị siri ike yana ihe pụrụ iche na-arụ ọrụ dị mkpa n'inweta nkenke na ntụkwasị obi. N'adịghị ka ihe ọdịnala, akụkụ SiC siri ike nwere ogologo oge na-enweghị atụ ma na-eyi nguzogide, na-eme ka ọ bụrụ ihe dị mkpa na ụlọ ọrụ na-achọ nkenke na ogologo ndụ.
Anyị Solid Silicon Carbide (SiC) Etching Rings bụ nke arụpụtara nke ọma yana njikwa mma iji hụ na arụmọrụ dị elu na ntụkwasị obi ha. Ma n'ichepụta semiconductor ma ọ bụ mpaghara ndị ọzọ metụtara ya, mgbanaka siri ike Silicon Carbide (SiC) nwere ike inye arụmọrụ etching kwụsiri ike yana nsonaazụ etching mara mma.
Ọ bụrụ na ị nwere mmasị na mgbanaka siri ike nke Silicon Carbide (SiC), biko kpọtụrụ anyị. Ndị otu anyị ga-enye gị ozi ngwaahịa zuru ezu na nkwado teknụzụ ọkachamara iji gboo mkpa gị. Anyị na-atụ anya ka gị na gị na-arụkọ ọrụ ogologo oge na ijikọ aka kwalite mmepe nke ụlọ ọrụ ahụ.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%.