Ngwa ngwa ngwa silicon nitride na-eguzogide ọgwụ

Nkọwa dị mkpirikpi:

Ụgwọ nke ụlọ ọrụ WeiTai EnergyỤgwọ nke ụlọ ọrụ Technology Co., Ltd.bụ onye na-ebute ụzọ na-eweta ọkachamara na wafer na ihe oriri semiconductor dị elu.Anyị raara onwe anyị nye inye ngwaahịa dị elu, ntụkwasị obi, na ihe ọhụrụ maka nrụpụta semiconductor,ụlọ ọrụ fotovoltaicna mpaghara ndị ọzọ metụtara ya.

Ahịrị ngwaahịa anyị gụnyere ngwaahịa graphite nke SiC / TaC na ngwaahịa seramiiki, gụnyere ihe dị iche iche dị ka silicon carbide, silicon nitride, na aluminum oxide na wdg.

Dị ka onye na-ebubata ntụkwasị obi, anyị ghọtara mkpa ihe oriri na-emepụta na usoro mmepụta ihe, anyị na-agbakwa mbọ na-ebuga ngwaahịa ndị na-agbaso ụkpụrụ kachasị elu iji mezuo mkpa ndị ahịa anyị.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Silicon nitride jikọtara ya na silicon carbide kiln nwere njirimara nke ike dị elu nke okpomọkụ, ezigbo nguzogide ujo, nrụrụ dị mfe, nguzogide oxidation, nguzogide corrosion, ezigbo ọkụ ọkụ na ihe ndị ọzọ.

Ngwongwo ụlọ ọkụ (5)

Ihe ngosi arụmọrụ isi

Ihe

Ndekọ ọkụ brik

Nkọwa nke Kiln

Index nke ngwaahịa akpụrụ akpụ

Porosity pụtara(%)

<16

<16

<14

Nnukwu njupụta(g/cm3)

2 2.65

2 2.65

2 2.68

Ike mkpakọ na ụlọ okpomọkụ(MPa)

2160

2170

2180

Ike na-ehulata na ụlọ okpomọkụ(1400X:) MPa

240

245

245

Ike na-ehulata okpomọkụ dị elu(1400r) MPa

250

250

250

Ọnụọgụ nke mgbasawanye thermal(110CTC)xioVC

<4.18

<4.18

<4.18

Thermal conductivity(1100C)

216

216

216

Refractories(°C )

1800

1800

1800

0.2 MPa Ọnọdụ okpomọkụ dị nro n'okpuru ibu(X:)

1600

1600

> 1700

Okpomọkụ kachasị arụ ọrụ(°C)

1550

1550

1550

A na-eji ngwaahịa ndị a na-eji seramiiki egweri, ngwaahịa aluminom dị elu, bọọlụ aluminom, ụlọ ọrụ mmepụta ihe, seramiiki eletrọnịkị, igwe eletriki eletrik dị elu, ihe dị ọcha, poselin kwa ụbọchị, nitride alloy na ceramics foam na ụlọ ọrụ ndị ọzọ.

Ngwongwo ụlọ ọkụ (7)

Ụlọ ọrụ Semicera

Ụlọ ọrụ Semicera 2Igwe eji eme ihe

Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD Ọrụ anyị


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