Blue / green LED epitaxy sitere na semicera na-enye ngwọta dị mma maka nrụpụta LED dị elu. Ezubere iji kwado usoro uto epitaxial dị elu, teknụzụ na-acha anụnụ anụnụ / akwụkwọ ndụ akwụkwọ ndụ LED na-eme ka arụmọrụ na izi ezi na-emepụta LEDs na-acha anụnụ anụnụ na akwụkwọ ndụ akwụkwọ ndụ, dị oke mkpa maka ngwa optoelectronic dị iche iche. N'iji Si Epitaxy na SiC Epitaxy ọgbara ọhụrụ, ihe ngwọta a na-eme ka ọ dị mma na ịdịte aka.
N'ime usoro nrụpụta, MOCVD Susceptor na-arụ ọrụ dị oke mkpa, yana akụrụngwa dịka PSS Etching Carrier, ICP Etching Carrier, na RTP Carrier, nke na-ebuli gburugburu uto epitaxial. Emebere Semicera's Blue/green LED epitaxy iji nye nkwado kwụsiri ike maka LED Epitaxial Susceptor, Barrel Susceptor, na Monocrystalline Silicon, na-ahụ na mmepụta nke na-agbanwe agbanwe, nsonaazụ dị elu.
Usoro epitaxy a dị mkpa maka ịmepụta akụkụ fotovoltaic ma na-akwado ngwa dị ka GaN na SiC Epitaxy, na-eme ka arụmọrụ semiconductor zuru ezu. Ma na nhazi Pancake Susceptor ma ọ bụ jiri ya mee ihe na ntọala ndị ọzọ dị elu, semicera's Blue/green LED epitaxy ngwọta na-enye arụmọrụ a pụrụ ịdabere na ya, na-enyere ndị na-emepụta aka imezu ọchịchọ na-eto eto maka ihe ndị dị elu LED.
Isi atụmatụ:
1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.
Isi nkọwa nkemkpuchi CVD-SIC
| Njirimara SiC-CVD | ||
| Ọdịdị kristal | FCC β oge | |
| Njupụta | g/cm ³ | 3.21 |
| Isi ike | Vickers isi ike | 2500 |
| Nha ọka | μm | 2 ~ 10 |
| Ịdị ọcha kemịkalụ | % | 99,99995 |
| Ike ikpo ọkụ | J·kg-1 · K-1 | 640 |
| Sublimation okpomọkụ | ℃ | 2700 |
| Ike Felexural | MPa (RT 4-isi) | 415 |
| Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
| Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
